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UCC27201A 单片机驱动 烧毁

Other Parts Discussed in Thread: UCC27201A, UCC27201

我想请教大家一个问题,就是我用UCC27201A做全桥驱动,单片机输出峰值为5V的48KHz死区互补方波,由于手里有现成的MOS管,就用的IRF530N,芯片供电12V。但是当我把信号通过光耦给5脚6脚HI与LI,想看一下HO与LO波形(mos管没有上电),但芯片烧毁了,请问这是怎么回事呢?两块芯片都是这样就没有了,这可能是什么原因造成的呀